Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP6586275
Kind Code:
B2
Abstract:
Provided is a vacuum pump having a stator disc having a divided structure, in which gaps or misalignments that occur between connection surfaces at which the divided structure is connected are reduced. In a turbo-molecular pump according to this embodiment, a mating relationship between a stator disc and a stator member for alignment (center-alignment) is opposite from that of the related art. Specifically, in a structure in which a base and the stator disc are fitted together, center alignment (positioning/centering) is performed through a structure in which an outer peripheral surface of the stator disc is held (restrained from an outer side) by an inner peripheral surface of the base to be connected thereto. Further, the mating structure of the stator disc includes an integral component. Moreover, the mating position of a stator blade and the mating position of the stator disc having a Siegbahn structure are provided separately.
Inventors:
Yoshinobu Otachi
Yasushi Maejima
Tsutomu Takaada
Yasushi Maejima
Tsutomu Takaada
Application Number:
JP2015017258A
Publication Date:
October 02, 2019
Filing Date:
January 30, 2015
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP2010504464A | ||||
| JP4330397A | ||||
| JP60077795U | ||||
| JP5332284A | ||||
| JP4044496U | ||||
| JP4065992U | ||||
| JP3135312U | ||||
| JP201174903A |
Foreign References:
| WO2010016141A1 |
Attorney, Agent or Firm:
Hitoshi Nakano
Takashi Kawai
Takashi Kawai