Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP7281964
Kind Code:
B2
Abstract:
To provide a vacuum pump which can properly determine a failure of the pump, and its rough operation method.SOLUTION: This vacuum pump comprises a pump main body, a motor, a drive circuit, and a control part. The pump main body has a rotating shaft. The motor has a rotor core including a permanent magnet, and attached to the rotating shaft, and a stator core having a coil. The drive circuit has a drive part for supplying a drive current for rotating the motor to the coil, and a detection part for detecting an induction voltage which is generated at the coil. The control part controls the drive circuit. A control unit selectively performs a first control mode for supplying the drive current to the motor, and a second control mode for acquiring a time change of the induction voltage at non-electricity carrying for stopping the supply of the drive current to the motor.SELECTED DRAWING: Figure 5
More Like This:
Inventors:
Kenji Machiya
Tomonari Tanaka
Toshio Suzuki
Tomonari Tanaka
Toshio Suzuki
Application Number:
JP2019095893A
Publication Date:
May 26, 2023
Filing Date:
May 22, 2019
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F04D19/04
Domestic Patent References:
| JP3115796A | ||||
| JP2014180081A | ||||
| JP2002295398A | ||||
| JP2019047680A | ||||
| JP10184586A |
Attorney, Agent or Firm:
Patent Attorney Corporation Minami Aoyama International Patent Office
Junichi Ohmori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino
Junichi Ohmori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino
Previous Patent: Energy management system and energy management method
Next Patent: replacement container
Next Patent: replacement container