Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP7378697
Kind Code:
B2
Abstract:
The invention provides a vacuum pump that is configured by dividing an intake opening flange and a casing (outer tube) into two components and reducing the weight while maintaining the required strength, with the result that the manufacturing cost can be reduced. A vacuum pump 1 is configured such that an intake opening flange 100 and a casing (outer tube) 2 are divided into separate members. The intake opening flange 100 uses a stainless steel material and the casing (outer tube) 2 uses an aluminum material. When the vacuum pump 1 is assembled the two members are fastened together with bolts and sealed with an O-ring to ensure the vacuum property. Thus, the weight of the vacuum pump 1 can be reduced while maintaining the strength of the intake opening flange 100.
Inventors:
Naoko Yoshihara
Hiroyuki Sakaguchi
Youhei Ogawa
Hiroyuki Sakaguchi
Youhei Ogawa
Application Number:
JP2019171350A
Publication Date:
November 14, 2023
Filing Date:
September 20, 2019
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F04B37/16
Domestic Patent References:
| JP2003003988A | ||||
| JP2017190744A | ||||
| JP2006037951A | ||||
| JP60028298U |
Foreign References:
| WO2008035497A1 | ||||
| WO2006068014A1 |
Attorney, Agent or Firm:
Hitoshi Nakano
Takashi Kawai
Takashi Kawai