PURPOSE: To simplify the constitution more, conjointly with the structure of providing the rotor with a vane in the shape of curving, abolishing the circular core inside an exhaust passage, and reduce the quantity of adhering congelation such as reactive gas, etc., and clean the congelation favorably.
CONSTITUTION: An upper vane start 51 and a lower vane end 52 are displaced with each other backward and forward in the direction of time rotation of a rotor 2, and besides the vane plate body 53, whose plate face fronts on a recess 4, is inclined to the axis of the rotor 2, and gas molecules are exhausted being turned along the inclined vane plate body 53 even if a circular core is not provided inside an exhaust passage 3, and the gas molecules are exhausted efficiently, being brought into contact with the vanes 3 over several times thereby being accelerated. This way, by the abolition of the circular core, the structure is simplified, and also the inner structure of the exhaust passage 3 is simplified, and the quantity of adhering congelation such as reactive gas, etc., is reduced, and it is so made that the cleaning liquid flow smoothly.
JP2001099088 | TURBO-MOLECULAR PUMP |
WO/2005/001294 | ROTARY IMPELLER FOR A TURBOMOLECULAR PUMP |
JPH08159157 | MAGNETIC BEARING DEVICE |
MAKI HIROMITSU
SAKAMOTO RYUICHI
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