PURPOSE: To provide high speed and down sizing, and improve exhaust performance, and reliability by arranging a rotating position sensor by electromagnetic inductive action, which is provided between a rotary shaft and a housing as a detecting means for detecting the rotation angle or number of rotation of a motor.
CONSTITUTION: Cylindrical rotors 6, 7 are fit to first and second rotary shafts 1, 2 to be supported by bearings 4a, 4b, 5a, 5b which is housed in a housing 3, screw grooves 8, 9 are formed so as to engage with each other on the circumferential surface thereof, and a part which is engaged is formed as a capacity type pump structure part (A). The rotor 15 of a high vacuum pump is provided on the upper part of the second rotary shaft 2. Parts which are formed by drug grooves 18, 19 and fixing side housings 16, 17 are formed as a high vacuum pump structure part (B). Rotating position sensors 20, 21 are provided on the bottom end part of the first rotary shaft 1 and the second rotary shaft 2, and housed in a sensor housing chamber 23. The brushless resolvers of electromagnetic inductive action are used in the rotating position sensors 20, 21.
ABE RYOICHI
TAKARA AKIRA
IKEMOTO YOSHIHIRO
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