Title:
真空圧送システム
Document Type and Number:
Japanese Patent JP5887135
Kind Code:
B2
Abstract:
The present invention relates to a vacuum pumping system (10) which comprises: a vacuum pumping mechanism (12) and a motor (14) for driving the vacuum pumping mechanism. Means (16) are provided for determining a cumulative load on the vacuum pumping system over time by monitoring a characteristic of the motor over that time. Means (18) are also provided for activating a maintenance activity on the system when the cumulative load exceeds a predetermined amount.
Inventors:
Philip Laurent Marc
Gibbins nigel james
Chaniac Michael Roger
Mooney Michael
Gibbins nigel james
Chaniac Michael Roger
Mooney Michael
Application Number:
JP2011512212A
Publication Date:
March 16, 2016
Filing Date:
June 02, 2009
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04B49/10; F04B37/16
Domestic Patent References:
| JP2004124765A | ||||
| JP8502565A | ||||
| JP2008545088A |
Foreign References:
| WO2007003862A2 |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Disciple Maru Ken
Shinichiro Tanaka
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
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