Title:
真空ポンプ、保護網及び接触部品
Document Type and Number:
Japanese Patent JP7289627
Kind Code:
B2
Abstract:
A vacuum pump that is small in height (length) is configured to bring a rotating body and a protective net as close to each other as possible by causing the rotating body to actively support the protective net. The vacuum pump is provided with a mechanism that causes a rotating body (a shaft or a rotor) to actively support a protective net when the protective net becomes deformed (bent) toward the vacuum pump side due to a change in pressure or temperature of the vacuum pump. Specifically, instead of preventing the protective net from being caught in the rotating body by increasing the distance therebetween, the entanglement of the protective net is prevented by actively supporting the protective net by bringing the protective net and the rotating body closer to each other. Accordingly, the height (length) of the vacuum pump can be reduced more.
Inventors:
Toshiki Yamaguchi
Application Number:
JP2018204847A
Publication Date:
June 12, 2023
Filing Date:
October 31, 2018
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP1123138U | ||||
| JP9075643A | ||||
| JP2001059496A | ||||
| JP2196192A |
Foreign References:
| WO2008139614A1 |
Attorney, Agent or Firm:
Hitoshi Nakano
Takashi Kawai
Takashi Kawai