Title:
真空ポンプ、及び、真空ポンプ構成部品
Document Type and Number:
Japanese Patent JP7150565
Kind Code:
B2
Abstract:
To provide a vacuum pump that is capable of efficiently cooling gas and requires less maintenance. The vacuum pump includes: a main body casing having an inlet portion and an outlet portion for gas; a turbomolecular pump mechanism portion in which a stator blade and a rotor blade are formed; a thread groove pump mechanism portion provided at a downstream side of the turbomolecular pump mechanism portion; a cooling trap portion that cools the gas led out from the turbomolecular pump mechanism portion and causes the gas to flow out to a side of the thread groove pump mechanism portion; and a partition wall that guides the gas led out from the turbomolecular pump mechanism portion to the cooling trap portion.
Inventors:
Sakaguchi Yuyuki
Application Number:
JP2018205003A
Publication Date:
October 11, 2022
Filing Date:
October 31, 2018
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP2003254284A | ||||
| JP3199699A | ||||
| JP2015190404A | ||||
| JP612794U | ||||
| JP201586856A |
Foreign References:
| WO2015122215A1 | ||||
| US20080253903 |
Attorney, Agent or Firm:
Koji Mizuno
Ryo Matsushita
Keita Noguchi
Ryo Matsushita
Keita Noguchi