Title:
【発明の名称】真空調整器
Document Type and Number:
Japanese Patent JPH073270
Kind Code:
B2
Abstract:
A vacuum controller for controlling the vacuum at a controlled vacuum which includes a balanced piston arrangement coupled to a valve piston reciprocal with respet to a valve seat positioned between the controlled vacuum and a high header or source vacuum. A throttling of the header vacuum takes place across the space between the valve piston and valve seat and is such that the header vacuum does not influence the movement of the valve piston.
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Inventors:
Robert Vincent Skalano
Joseph A. Bolton
Joseph A. Bolton
Application Number:
JP20940487A
Publication Date:
January 18, 1995
Filing Date:
August 25, 1987
Export Citation:
Assignee:
Cermo Fibertech Inc.
International Classes:
F16K31/12; F16K31/122; F04B37/16; F16K39/02; F16K51/02; G05D16/18; (IPC1-7): F16K31/12; F16K51/02
Attorney, Agent or Firm:
Yamashita
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