Title:
VACUUM SENSOR
Document Type and Number:
Japanese Patent JP3171410
Kind Code:
B2
Abstract:
PURPOSE: To measure absolute pressure within a wide range of gas with only a device and achieve miniaturization in simple structure in regard to a vacuum sensor for detecting an absolute pressure value from the change of an electrostatic capacity value.
CONSTITUTION: Diaphragm electrodes 3-5 composed of pairs of opposed conductive thin films 3A-5A sandwiching inside spaces 3B-5B are arranged to fix their circumferential edges on a board 1. A plurality of the pairs of the diaphragm electrodes 3-5 composed of structure respectively different in the areas of the conductive thin films 3A-5A are electrically insulated and serially provided on the board 1 in a condition where the spaces 3B-5B between each diaphragm electrode 3-5 are mutually made to communicate and sealed in a high vacuum.
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Inventors:
Masayoshi Esashi
Masaki Moronuki
Koji Hemmi
Masaki Moronuki
Koji Hemmi
Application Number:
JP25499192A
Publication Date:
May 28, 2001
Filing Date:
September 24, 1992
Export Citation:
Assignee:
Masayoshi Esashi
ANELVA Co., Ltd.
Daia Vacuum Co., Ltd.
ANELVA Co., Ltd.
Daia Vacuum Co., Ltd.
International Classes:
G01L7/00; G01L9/12; G01L21/00; (IPC1-7): G01L21/00; G01L9/12
Domestic Patent References:
| JP6140529A |
Attorney, Agent or Firm:
Shigeru Kinoshita (2 outside)
Shigeru Kinoshita
Shigeru Kinoshita
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