Title:
VACUUM SLUICE VALVE
Document Type and Number:
Japanese Patent JP3244344
Kind Code:
B2
Abstract:
PURPOSE: To provide a vacuum sluice valve which can improve a thrust at a position requiring the most sealing force and seal the valve body by using a small-capacity, small-size driving source for valve opening/closing.
CONSTITUTION: At an entrance/exit 2 of the vacuum preliminary subchamber in the vacuum treatment chamber used for bringing in/taking out a substrate to be treated, a valve body 3 for opening/closing it is held rotary, the valve body 3 is held by a spring 4 in the opening direction, a slanted cam 5 is provided on this valve body 3, and an operating rod 6 is stretched on a slant 5A of this slanted cam 5 to press a rotary body 7 held thereby, thus providing a direct-run type driving source for opening/closing 8 to maintain the closed valve condition.
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Inventors:
Genichi Kanazawa
Application Number:
JP15113393A
Publication Date:
January 07, 2002
Filing Date:
May 28, 1993
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
F16K1/20; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H01L21/205; F16K1/20; H01L21/3065
Domestic Patent References:
| JP5164256A | ||||
| JP349468U | ||||
| JP595038U |
Attorney, Agent or Firm:
Hisako Ishido (1 person outside)