Title:
VACUUM STATIC ELIMINATOR
Document Type and Number:
Japanese Patent JP2023040748
Kind Code:
A
Abstract:
To provide a vacuum static eliminator capable of eliminating static electricity without supplying gas from the outside in a high vacuum area.SOLUTION: A vacuum chamber 1 includes a mesh electrode 6 to which a positive voltage is applied, a ground electrode 2 that forms an electric field with the mesh electrode 6, and a filament 10 that is provided near the mesh electrode 6 and emits thermoelectrons, and residual gas molecules in the vacuum chamber 1 are ionized by motion of thermal electrons emitted from the filament 10 and receiving force from the electric field formed by the mesh electrode 6.SELECTED DRAWING: Figure 1
Inventors:
MOGAMI TOMOFUMI
MINEMURA KAZUKI
IKEHATA TAKASHI
MINEMURA KAZUKI
IKEHATA TAKASHI
Application Number:
JP2021147895A
Publication Date:
March 23, 2023
Filing Date:
September 10, 2021
Export Citation:
Assignee:
KASUGA ELECTRIC CO
International Classes:
H05F3/04; C23C14/02; G11B5/84; H05F3/06
Attorney, Agent or Firm:
Patent Attorney Corporation iLink International Patent and Trademark Office
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