VACUUM SUCKING DEVICE - NIHON CERATEC CO LTD

Title:

VACUUM SUCKING DEVICE

Document Type and Number:

Japanese Patent JP2004283936

Kind Code:

A

Abstract:

To provide a vacuum sucking device not causing inconvenience due to a step on a surface to suck a sucked article and not generating spotting, etc. on the sucked surface even in the case of performing wet processing.

This vacuum absorber 1 is provided with a placing member 2 to place the sucked article 10 on it and the sucking surface 2a of which is formed by polishing work, a supporting member 3 to support the circumference and the lower surface of the placing member 2 and a suction part 4 provided on the back surface side of the placing member, 2 and vacuum-sucks the sucked article 10 placed on the placing member 2 by sucking it from the suction part 4, and the placing member 2 has a central member 5 made of porous ceramic to support the central part of the sucked article 10 and a peripheral edge member 6 made of dense free-cutting ceramic provided on the circumference of the central member 5 and to support the peripheral edge of the sucked article 10.

Inventors:

SASAKI SHUNICHI
ISHINO TOMOHIRO
MORI MASAHIRO
ISHII MAMORU
SHIOGAI TATSUYA

Application Number:

JP2003077520A

Publication Date:

October 14, 2004

Filing Date:

March 20, 2003

Export Citation:

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Assignee:

NIHON CERATEC CO LTD
TAIHEIYO CEMENT CORP

International Classes:

B25J15/06; B23Q3/08; B24B37/30; H01L21/304; H01L21/68; H01L21/683; (IPC1-7): B24B37/04; B23Q3/08; B25J15/06; H01L21/304; H01L21/68

Attorney, Agent or Firm:

Hiroshi Takayama

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