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Title:
VACUUM SUCTION CHUCK AND GRINDING MACHINE USING THE SAME
Document Type and Number:
Japanese Patent JP2008296334
Kind Code:
A
Abstract:

To provide a vacuum suction chuck having high vacuum suction force and a grinding machine using the same vacuum suction chuck.

The vacuum suction chuck has: a base 15 having a recessed section 11 formed on its upper surface, a first through-hole 12 formed on the bottom of the recessed section 11, grooves 13a, 13b formed on its upper surface so as to surround the recessed section 11 and second through-holes 14a, 14b formed on the bottoms of the grooves 13a, 13b; and a porous body 16 with gas permeability having its upper surface flush with an upper surface of the base 15, and buried in the recessed section 11 of the base 15. A grinding coolant 50 including grinding dust entering between a base plate 17 and the base 15 is sucked into the grooves 13a, 13b, and is discharged to the outside via the second through-holes 14a, 14b. The porous body 16 is then prevented from being clogged with grinding dust, and the vacuum suction chuck maintains high suction force.


Inventors:
FUJII KOJI
Application Number:
JP2007145713A
Publication Date:
December 11, 2008
Filing Date:
May 31, 2007
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B23Q3/08; B24B41/06
Attorney, Agent or Firm:
Hiroshi Horiguchi