To provide a vacuum suction device which can prevent a mounting surface thereof from being deformed when a substrate is vacuum-sucked, and achieves grinding of the substrate with high precision.

The vacuum suction device is formed of: a mounting portion which is made of a porous ceramics, for sucking and holding the substrate onto a mounting surface; a support portion which supports a peripheral edge of the substrate; and a base on which the mounting portion and the support portion are set. Herein at least a joint surface of the base contacting with the mounting portion is formed into a convex shape that is the highest at an almost central portion thereof. Further when the substrate is vacuum-sucked, a difference between a maximum value and a minimum value of a sinking quantity of the mounting surface is set to 3 m or less.