Title:
真空吸着保持装置およびその方法
Document Type and Number:
Japanese Patent JP5787711
Kind Code:
B2
Inventors:
Akira Okada
Nojiri Eiji
Yasuhiro Yoshiura
Nojiri Eiji
Yasuhiro Yoshiura
Application Number:
JP2011229519A
Publication Date:
September 30, 2015
Filing Date:
October 19, 2011
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/683; H01L21/66
Domestic Patent References:
| JP9246365A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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