Title:
真空システム
Document Type and Number:
Japanese Patent JP5902740
Kind Code:
B2
Abstract:
A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.
More Like This:
| WO/2000/053928 | VACUUM DEVICE |
| JPH0757297 | INDUSTRIAL APPLICABILITY: Fine particle trap for vacuum exhaust system |
Inventors:
Tobias Stol
Robert Watts
Michael Schweighoefer
Robert Watts
Michael Schweighoefer
Application Number:
JP2014059633A
Publication Date:
April 13, 2016
Filing Date:
March 24, 2014
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04B37/16; F04D19/04; F16J15/06; F16J15/10
Foreign References:
| US20070258836 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Kiyota Eisho
Blacksmith
Atsushi Shinohara
Kiyota Eisho