Title:
VACUUM TREATMENT DEVICE
Document Type and Number:
Japanese Patent JPS61236138
Kind Code:
A
Abstract:
PURPOSE:To suppress a sample with a less area and to improve the yield of the sample by a method wherein the sample stand is made to reciprocally move and the weight to suppress the sample is made to automatically align. CONSTITUTION:A substrate 2 is placed on the center of an electrode 1, the electrode 1 is made to ascend and the points of aligning arms 4 are fitted into the recessed parts of the inner side of a weight 3. When the electrode 3 is made to further continue ascending, the inclined parts 4b of the aligning arms 4 are brought into contact to rollers 8, the inclined parts 4b are gradually suppressed by the rollers 8, the points of the aligning arms 4 are gradually push to spread around pins 5, a force is applied to the direction to push to spread the d-diameter wall surface on the inner side of the weight 3 and the weight 3 is moved by the aligning arms 4. Furthermore, when the electrode 1 is made to ascend, the rollers 8 pass through the inclined parts 4b and get off from the aligning arms 4, the force of the aligning arms 3, which is suppressing the weight 3, is released and the substrate 2 is suppressed with the weight only of the weight 3. By enabling the electrode 1 to vertically move, the aligning arms 4 are actuated and the weight 3 is conformed to the center of the electrode 1.
Inventors:
FUKUDA SUMIO
TAMURA NAOYUKI
TSUBONE TSUNEHIKO
TAMURA NAOYUKI
TSUBONE TSUNEHIKO
Application Number:
JP7657285A
Publication Date:
October 21, 1986
Filing Date:
April 12, 1985
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/683; H01L21/67; H01L21/677; H01L21/68; H01L21/687; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Katsuo Ogawa