Title:
VACUUM UNIT
Document Type and Number:
Japanese Patent JP3791944
Kind Code:
B2
Abstract:
PURPOSE: To prevent the air in a clean room from being polluted, to prevent grease, etc., from being adhered to a work, and to achieve the favorable suction and carriage of a liquid crystal parts, etc., to which the cleanliness is especially required.
CONSTITUTION: A vacuum unit 10 is provided with a manifold block 12, a flow passage selector valve part 14 attached to one side of the manifold block 12, a suction filter 92 provided on a passage to communicate a negative pressure feeding port 22 with a vacuum port, a clean gas filter 96 provided on a passage to communicate a compressed air feeding port 26 for vacuum breaking with the vacuum port, and a diaphragm valve 60 to open/close a passage to communicate the compressed air feeding port 26 for vacuum breaking with the clean gas filter 96.
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Inventors:
Shigekazu Nagai
Hiroshi Matsushima
Hiroshi Matsushima
Application Number:
JP15071595A
Publication Date:
June 28, 2006
Filing Date:
June 16, 1995
Export Citation:
Assignee:
SMC Corporation
International Classes:
F04B41/00; F04F5/20; F04F5/44; (IPC1-7): F04F5/20; F04F5/44
Attorney, Agent or Firm:
Takehiro Chiba
Tatsuhiko Sato
Tatsuhiko Sato