Title:
VACUUM VALVE AND VACUUM VALVE CONTROL SYSTEM
Document Type and Number:
Japanese Patent JP2011012531
Kind Code:
A
Abstract:
To provide a vacuum valve to be opened easily in a simple constitution.
This vacuum valve 1 includes a valve element 13 abutting on a valve seat 12 to close a flow channel 11, a diaphragm 17 attached to the valve element 13 via a rod 14, and a valve driving chamber 10 for storing the diaphragm 17. The valve driving chamber 10 is divided into a rod side chamber 19 and a head side chamber 18 by the diaphragm 17, separates the valve element 13 from the valve seat 12 by introducing a vacuum pressure into the head side chamber 18, to open the valve, and brings the valve element 13 into contact with the valve seat 12 by introducing a vacuum pressure into the rod side chamber 19, to close the valve.
Inventors:
ARAKI TAKEKUNI
TAKEMURA SHIGEO
TOICHI YUKIAKI
TAKEMURA SHIGEO
TOICHI YUKIAKI
Application Number:
JP2009186723A
Publication Date:
January 20, 2011
Filing Date:
August 11, 2009
Export Citation:
Assignee:
SEKISUI CHEMICAL CO LTD
International Classes:
E03F7/00; E03F5/22; F16K31/126; F16K51/02
Domestic Patent References:
| JPH11294625A | 1999-10-29 | |||
| JP2007146923A | 2007-06-14 | |||
| JPH0391503U | 1991-09-18 |
Attorney, Agent or Firm:
Tamio Nishiwaki