Title:
VACUUM VALVE AND VALVE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2018112267
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum valve capable of suppressing temporal increase of slide resistance at a seal part of a rotational shaft.SOLUTION: A vacuum valve 1 includes: a valve plate 6 stored in a valve housing 4; a rotational shaft 72 penetrating an open hole 82 formed in the valve housing 4, and configured to drive the valve plate 6 in an oscillated manner; and an O-ring seal 80a provided between the rotational shaft 72 and the open hole 82, and configured to perform vacuum sealing. On a seal surface that contacts with the O-ring seal 80a, and on which the O-ring seal 80a slides with at least rotation of the rotational shaft 72, a plurality of recess part for lubricant holding is formed dispersedly.SELECTED DRAWING: Figure 2
Inventors:
TAGUCHI TATSUHIRO
KOGAME MASATO
KOGAME MASATO
Application Number:
JP2017003451A
Publication Date:
July 19, 2018
Filing Date:
January 12, 2017
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16K41/00; F16K51/02
Attorney, Agent or Firm:
Fuyuki Nagai