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Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2008121859
Kind Code:
A
Abstract:

To provide a vacuum valve which can improve the durability of a bellows.

The vacuum valve 1 comprises: a valve part 2 which makes a valve body 10 abut on a valve seat 9 which is arranged between a first port 7 and a second port 8, and separates the valve body from the valve seat; an actuator 3 which varies pressure imparted to a piston 22 by the pressure variation of an operation fluid, and imparts a drive force to the valve part 2; and a bellows 31 which expands and contracts following the linear reciprocating motion of the valve body 10. Operation speeds of the valve body 10 and the piston 22 are adjusted by an effective area of an orifice 24 to which the operation fluid is fed, and damage to the bellows 31 is prevented.


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JPS63275873VALVE ACTUATOR
Inventors:
NAITO MASAHIRO
IKUMICHI NORISUKE
ITO SHIN
IWATA MAKOTO
Application Number:
JP2006309277A
Publication Date:
May 29, 2008
Filing Date:
November 15, 2006
Export Citation:
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Assignee:
CKD CORP
International Classes:
F16K31/143; F16K47/00; F16K51/02
Domestic Patent References:
JP2000227166A2000-08-15
JPH0284078U1990-06-29
JPH0187306U1989-06-09
JPH0332258U1991-03-28
JPS6280078U1987-05-22
JP2003083467A2003-03-19
JPH04106576U1992-09-14
JP2006170347A2006-06-29
JP2005233298A2005-09-02
JPH1137329A1999-02-12
JPH10238512A1998-09-08
JPH09296877A1997-11-18
JPH09178037A1997-07-11
JPH0953751A1997-02-25
JPH0379872A1991-04-04
JPH0643436U1994-06-10
JPH0525078U1993-04-02
JPH0454304U1992-05-11
JPS62162485U1987-10-15
JPS6119183U1986-02-04
JP2005061793A2005-03-10
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office