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Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2009257357
Kind Code:
A
Abstract:

To provide a vacuum valve capable of preventing part from being corroded.

A vacuum valve 1, which comprises a valve main body 4 in which a valve seat 10 is arranged between a first aperture 6 and a second aperture 7, a valve body 14 contacting with or separating from the valve seat 10, a driving section 2 applying driving force to the valve body 14 wherein the valve body 14 is attached to a rod member 29 projected within the valve main body 4, and a bellows 12 which is arranged within the valve main body 4 so that it may cover the rod member 29 and attaches the valve body 14 to valve seat side end surface, includes a purge gas supplying section 37 which is arranged between the valve main body 4 and the driving section 2 and supplies the purge gas, a purge gas discharging section 38 which is arranged between the valve main body 4 and the driving section 2 and discharges the purge gas, and arranges a communicating channel 39 making the purge gas supplying section 37 communicate with an internal space of the bellows 12 in the rod member 29.


Inventors:
OZAWA YUKIO
Application Number:
JP2008103892A
Publication Date:
November 05, 2009
Filing Date:
April 11, 2008
Export Citation:
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Assignee:
CKD CORP
International Classes:
F16K1/32; F16K41/10; F16K51/02
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office