Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2011075017
Kind Code:
A
Abstract:
To provide a vacuum valve capable of increasing conductance without enlarging the total height of the valve.
In the vacuum valve 1 arranged in piping connected to a vacuum vessel and controlling the degree of vacuum in the vacuum vessel by opening and closing of the valve, a body 2 including a valve element 5 therein is a cylindrical shape, a first cylindrical hole part 109 and a second cylindrical hole part 3 are provided on a side surface of the body 2 by the same processing method. A port forming member 104 is connected to the first cylindrical hole part 109, and a closing member 4 closing an opening end surface of the second cylindrical hole part 3 is connected to the second cylindrical hole part 3.
Inventors:
OGISU TOSHIKAZU
SUGATA KAZUHIRO
ITO MINORU
YAMADA YOSHIYUKI
SUGATA KAZUHIRO
ITO MINORU
YAMADA YOSHIYUKI
Application Number:
JP2009226836A
Publication Date:
April 14, 2011
Filing Date:
September 30, 2009
Export Citation:
Assignee:
CKD CORP
International Classes:
F16K27/02; F16K1/00; F16K1/32; F16K51/02
Domestic Patent References:
| JPH06323467A | 1994-11-25 | |||
| JPH01116280U | 1989-08-04 | |||
| JPS58123980U | 1983-08-23 | |||
| JPS5728973U | 1982-02-16 |
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office
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