Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2016031121
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum valve which can prevent corrosion by welding an abutment portion of a body and a valve seat part from both the outside and the inside of the body.SOLUTION: A vacuum valve 1 comprises; a valve housing 10 in which first and second ports 11, 13 are made to communicate with each other via a valve body accommodation chamber 12, a cylindrical valve hole forming part is arranged concentrically with the first port 11 so as to protrude into the valve body accommodation chamber 12, and a valve seat 15 is arranged at the valve hole forming part; a valve body 3 which abuts on or separates from the valve seat 15; and an actuator part 2 which imparts a drive force to the valve body 3. The valve housing 10 has a cylinder body 16, and a valve seat part 17 which is welded to the body 16 in a state of blocking one end opening part of the body 16. A valve seat part 17 is constituted by detachably connecting a port forming member 21 in which the first port 11 is formed, and which is welded to the body 16, and a cylindrical member 22 which is cylindrically formed, and constitutes the valve hole forming part and the valve seat 15 via a seal member 30.SELECTED DRAWING: Figure 1
Inventors:
NISHIMURA YASUNORI
Application Number:
JP2014154457A
Publication Date:
March 07, 2016
Filing Date:
July 30, 2014
Export Citation:
Assignee:
CKD CORP
International Classes:
F16K51/02; F16K1/32; F16K1/42; F16K27/10
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office
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