Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2018112261
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum valve capable of suppressing deflection of a valve plate occurring due to pressure difference between the upstream side and downstream side of the valve plate.SOLUTION: A vacuum valve 1 includes: a deflection suppression member S1 oppositely arranged to an opening part 31 side (upstream side) of a valve plate 8 in a cutoff state, and configured to suppress deflection of the valve plate 8 toward the opening part 31 side; and a deflection suppression member S2 oppositely arranged to an opening part 41 side (downstream side) of the valve plate 8 in the cutoff state, and configured to suppress deflection of the valve plate 8 toward the opening part 41 side.SELECTED DRAWING: Figure 2
Inventors:
TAGUCHI TATSUHIRO
Application Number:
JP2017003443A
Publication Date:
July 19, 2018
Filing Date:
January 12, 2017
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16K3/04; F16K51/02
Attorney, Agent or Firm:
Fuyuki Nagai
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