Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2019124194
Kind Code:
A
Abstract:
To provide a vacuum valve capable of preventing pump from breaking down even when suctioning a vacuum chamber at a predetermined pressure or higher when absorbing the vacuum chamber after open to the atmosphere with a high vacuum pump such as a turbo molecular pump.SOLUTION: A vacuum valve 1 comprises: a valve opening 15; an on-off valve (valve plate) 16 for open/close the valve opening 15; and a control device 13 for opening closing control the on-off valve 16. The control device 13 determines whether the pressure in a vacuum device is higher than the first pressure; when determining that the pressure in the vacuum device is higher than the first pressure, the control device 13 controls the on-off valve to be fully closed, or set the maximum on-off speed of the on-off valve to the first speed; when determining that the pressure in the vacuum device is lower than the first pressure, the maximum opening/closing speed of the on-off valve is set to a second speed higher than the first speed.SELECTED DRAWING: Figure 4
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Inventors:
NAKAMURA MASAYA
KOGAME MASATO
HIRATA NOBUYUKI
KOGAME MASATO
HIRATA NOBUYUKI
Application Number:
JP2018006506A
Publication Date:
July 25, 2019
Filing Date:
January 18, 2018
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04; G05D16/20
Domestic Patent References:
| JP2010153737A | 2010-07-08 | |||
| JP2014052062A | 2014-03-20 |
Attorney, Agent or Firm:
Fuyuki Nagai