Title:
真空用バルブ
Document Type and Number:
Japanese Patent JP5664846
Kind Code:
B2
Abstract:
A cartridge heater is accommodated in a heater bore in a shaft connected to a valve element, and a heating portion provided at an end portion of the cartridge heater is located at a joint portion of the shaft and the valve element. At the joint portion, a heat receiving groove and a pressurizing portion communicating with the heater bore are provided at a position between a surface of the valve element and that of the shaft located so as to oppose and to contact each other. The heat receiving groove includes an arcuate groove portion of the same radius as that of the heating portion of the cartridge heater, and the heating portion is pressed by the pressurizing portion to enter into plane-to-plane contact with an inner circumferential surface of the arcuate groove portion of the heat receiving groove, upon fastening the valve element and the shaft to each other with a bolt, with the heating portion located between the heat receiving groove and the pressurizing portion.
Inventors:
石垣 恒雄
小川 浩司
下田 洋己
小川 浩司
下田 洋己
Application Number:
JP2010119858A
Publication Date:
February 04, 2015
Filing Date:
May 25, 2010
Export Citation:
Assignee:
ＳＭＣ株式会社
International Classes:
F16K49/00; F16K51/02
Attorney, Agent or Firm:
Wood 宏
Wood Tadao tree
Wood Tadao tree