Title:
真空バルブ
Document Type and Number:
Japanese Patent JP6776903
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum valve capable of reducing occurrence of abrasion powder of a seal material.SOLUTION: A vacuum valve 1 includes: a drive shaft 101 configured to open/close a valve plate 8; a first holding part (a housing 10H, a rolling bearing 106) configured to hold the drive shaft 101 in a turnable manner; a magnetic fluid seal mechanism 105 configured to seal a gap between the drive shaft 101 and the first holding part; a second holding part (a tension spring 107, a recess part 111, a recess part 112, a pin 108) configured to hold the first holding part so as to be movable in an axial direction of the drive shaft 101; and a sealing member configured to seal a gap between a housing 4 and the second holding part.SELECTED DRAWING: Figure 3
Inventors:
Ryudai Taguchi
Application Number:
JP2017003440A
Publication Date:
October 28, 2020
Filing Date:
January 12, 2017
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F16K27/04; F16K31/04; F16K51/00; F16K51/02
Domestic Patent References:
| JP2009162319A | ||||
| JP5215275A |
Attorney, Agent or Firm:
Fuyuki Nagai
Morimoto Takuyuki
Morimoto Takuyuki