Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JPS5980571
Kind Code:
A
Abstract:
PURPOSE:To prevent lowering of vacuum due to abrasion of seal member while to facilitate holding of high vacuum by immersing a valve body in fused metal then sealing the valve seat section through solidification of said metal. CONSTITUTION:Low melting point metal 9 is placed in an annular recess 7 formed along a valve seat 6 and a heater 8 is provided, and in order to perform sealing it is evacuated under open state of valve body A then an operational handle of valve shaft 3 is rotated to pressure contact the annular end of bellows 2 against the upper face section of solder 9. Under this state the heater 8 is heated to fuse the solder 9 thus to immerse the annular end of bellows 2 into solder 9. When heating is stopped to solidify solder 9, vacuum sealed state is provided. When opening the valve body A, the heater 8 is reheated then the valve shaft 3 is rotated to lift said body A.
Inventors:
YOMO MASAMI
Application Number:
JP19167182A
Publication Date:
May 10, 1984
Filing Date:
October 29, 1982
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16K1/34; F16K51/02; (IPC1-7): F16K1/34
Domestic Patent References:
| JP39003485A |
Attorney, Agent or Firm:
Yasuhiko Takeishi
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