To provide a valve device capable of securing a flow rate and capable of smoothly opening and closing a valve element with excellent response.
The valve device is provided with a shaft 140 displacing in an axial direction by a driving mechanism, the valve element 130 for communicating or blocking between a primary chamber 110a and a secondary chamber 120a in accordance with displacement of the shaft 140 and a diaphragm 160, provided between a secondary chamber body 120 and the shaft 140 and engaged with the shaft 140, for following the displacing movement of the shaft 140 and bending. The diaphragm 160 has a skirt part 162 in a curved project shape projecting toward a valve element 130 side. A projection part 152 for suppressing the skirt part 162 from being deformed toward its back surface side is provided at the back surface side of the skirt part 162 in a manner capable of being inserted in a recessed part 162a in the back surface side of the skirt part 162.
COPYRIGHT: (C)2010,JPO&INPIT
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