To prevent any mistaken carriage of the object such as paper, and to improve the carrying accuracy by providing at least one laminate consisting of the dielectric base material impregnated in the resin, and providing a plurality of elements to control the fluid flow on the dielectric base material.
A micro device support system 10 comprises a plurality of micro devices including an array 26, a valve 27, and a sensor 28 of air conduits. A conveyor includes laminates 51-56 consisting of resin-impregnated fiber glasses which are adhered to each other, and the air conduits 26 includes tapered air conduits 31-34 having approximately circular section which is formed by offset- drilling laminate layers. The valve 27 is located on the air conduit 26 to control the fluid flow from a fluid pressure source 121 and to apply the force to an object to be carried, and includes a flap valve 37 and a solenoid valve embedded in a channel 42.
JACKSON WARREN B
CHEUNG PATRICK C P
YIM MARK H
BERLIN ANDREW A
