Title:
VALVE CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2018112932
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a valve control device that can more accurately perform pressure control through valve opening control.SOLUTION: A valve controller 2 controls the openings of a vacuum valve 1 on the basis of a pressure measurement value Pr and a pressure target value Ps of a vacuum chamber 3 to which a vacuum pump 4 is connected through the vacuum valve 1. The valve controller 2 comprises: a storage part 23 that stores correlation S(Q, θ) representing the relationship between the plurality of openings of the vacuum valve 1 and the plurality of flow rates of gas flowing through the vacuum valve 1 and an effective exhaust speed of an exhaust system consisting of the vacuum valve 1 and vacuum pump 4; and an opening control part 21 that controls the openings of the vacuum valve 1 on the basis of the pressure measurement value Pr, pressure target value Ps, and a correlation map.SELECTED DRAWING: Figure 1
Inventors:
NAKATANI ATSUO
OZAKI JUNICHIRO
NAKAMURA MASAYA
HIRATA NOBUYUKI
OZAKI JUNICHIRO
NAKAMURA MASAYA
HIRATA NOBUYUKI
Application Number:
JP2017003445A
Publication Date:
July 19, 2018
Filing Date:
January 12, 2017
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G05D16/20; F04B37/16; F04D19/04; F16K51/02
Domestic Patent References:
| JP2000507875A | 2000-06-27 | |||
| JP2002091573A | 2002-03-29 | |||
| JP2011134164A | 2011-07-07 | |||
| JP2013042000A | 2013-02-28 |
Attorney, Agent or Firm:
Fuyuki Nagai
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