Title:
VALVE CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2018112933
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a valve control device that can improve performance of pressure adjustment with a vacuum valve.SOLUTION: A valve controller 2 receives inputs of a pressure measurement value Pr of a vacuum chamber 3 to which a vacuum valve 1 is connected, a pressure target value Ps of the vacuum chamber 3, and an opening measurement value θr of the vacuum valve 1, and controls the openings θ of the vacuum valve 1 on the basis of a deviation between the pressure measurement value Pr and pressure target value Ps. The valve controller comprises: a storage part 23 that stores correlation between the openings of the vacuum valve 1 and the conductance of a system including the vacuum valve 1; and an opening setting part 21 that determines the rate of change (dS/dθ) of the conductance to a change in opening in the input opening measurement value θr on the basis of the correlation and sets the reciprocal of the rate of change as a correction gain. The valve controller controls the openings of the vacuum valve 1 on the basis of the deviation and correction gain.SELECTED DRAWING: Figure 1
Inventors:
HIRATA NOBUYUKI
OZAKI JUNICHIRO
NAKATANI ATSUO
NAKAMURA MASAYA
OZAKI JUNICHIRO
NAKATANI ATSUO
NAKAMURA MASAYA
Application Number:
JP2017003447A
Publication Date:
July 19, 2018
Filing Date:
January 12, 2017
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G05D16/20; F04B37/16; F04B49/06; F16K31/04; F16K37/00
Attorney, Agent or Firm:
Fuyuki Nagai
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