Title:
バルブ制御装置
Document Type and Number:
Japanese Patent JP6828446
Kind Code:
B2
Abstract:
A valve control device configured such that a pressure measurement value of a chamber, a target pressure value of the chamber, and an opening degree measurement value of the vacuum valve are input to the valve control device and configured to control an opening degree of the vacuum valve based on a deviation between the pressure measurement value and the target pressure value, comprises: a storage storing a correlation between the opening degree of the vacuum valve and a conductance of a system including the vacuum valve; and a correction gain setting section obtaining, based on the correlation, a change rate of the conductance in association with an opening degree change at the input opening degree measurement value, thereby setting an inverse of the change rate as a correction gain. The opening degree of the vacuum valve is controlled based on the deviation and the correction gain.
Inventors:
Nobuyuki Hirata
Junichiro Kozaki
Atsuo Nakatani
Masaya Nakamura
Junichiro Kozaki
Atsuo Nakatani
Masaya Nakamura
Application Number:
JP2017003447A
Publication Date:
February 10, 2021
Filing Date:
January 12, 2017
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
G05D16/20; F04B37/16; F04B49/06; F16K31/04; F16K37/00; F16K51/02
Domestic Patent References:
| JP2002510083A |
Foreign References:
| WO2009072241A1 |
Attorney, Agent or Firm:
Fuyuki Nagai
Morimoto Takuyuki
Morimoto Takuyuki