Title:
バルブ装置
Document Type and Number:
Japanese Patent JP6756262
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a valve device which can shorten time of arrival to a pressure target value.SOLUTION: The valve device comprises: an encoder 130 which measures an opening of a valve plate 12; a slewing determination part 211 into which a pressure measurement value Pr and a target pressure value Ps of a vacuum chamber 3 are inputted to determine a turning condition of the locus of points (θr,Pr) on an opening-pressure coordinate represented by an opening measurement value θr and the inputted pressure measurement value Pr; and an opening control part 212 which controls the opening of the valve plate 12 on the basis of a determination result of the slewing determination part 211 so that the pressure measurement value Pr reaches the target pressure value Ps.SELECTED DRAWING: Figure 1
Inventors:
Junichiro Kozaki
Application Number:
JP2016250658A
Publication Date:
September 16, 2020
Filing Date:
December 26, 2016
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
G05D16/20; F16K37/00; H02P29/00
Domestic Patent References:
| JP2015190496A | ||||
| JP2004240516A | ||||
| JP2011117488A |
Foreign References:
| WO2009072241A1 |
Attorney, Agent or Firm:
Fuyuki Nagai
Morimoto Takuyuki
Morimoto Takuyuki