PURPOSE: To improve the evaporating efficiency and to improve the sealability to prevent the leakage by realizing the abutting and the separation by keeping the smooth seal surface of a diaphragm approximately parallel to the smooth seal surface of a valve seat through application and release of the load of a driving means.
CONSTITUTION: In a valve for a liquid raw material evaporator, a liquid raw material discharge port 17 is provided on a metallic valve seat part 71 which is sufficiently large for the diameter and of mirror smooth sealing surface 70. A metallic thin diaphragm 6 which is larger than the smooth sealing surface 70 of the valve seat part 71, provided with a mirror smooth sealing surface 60 to realize the direct abutting and the separation to this smooth sealing surface 70 at the center and an elastic deformation part 61 on the outer side thereof, and provided with the peripheral edge part being sealed and held is arranged opposite to the valve seat part 71. Abutting and separation are realized by keeping the smooth seal surface 60 of the diaphragm 6 approximately parallel to the smooth sealing surface of the valve seat part 71 through the application and release of the load of a driving means.
MATSUOKA TORU
ONO HIROFUMI
LINTEC CORP