Title:
VALVE UNIT, AND FLUID CONTROL CHIP
Document Type and Number:
Japanese Patent JP2004170295
Kind Code:
A
Abstract:
To provide a valve unit of a wide dynamic range and quick response controlled easily and accurately, and reduced in pulsation, and an economical fluid control chip controlled easily and accurately, and easy to be replaced.
This valve unit/this flow control chip has a valve chamber 8 having an inlet and an outlet for a fluid, a valve element 3 stored in the valve chamber 8, a piezoelectric element for applying vibration onto the valve chamber 8, and a drive for driving the piezoelectric element 4. The piezoelectric element varies a frequency and/or an amplitude of the vibration applied onto the valve chamber 8, and an amplitude of the valve element 3 is varied by the varied vibration to vary an opening.
Inventors:
TAKEDA MASATOSHI
NAKANO KENICHI
NAKANO KENICHI
Application Number:
JP2002337686A
Publication Date:
June 17, 2004
Filing Date:
November 21, 2002
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01N35/08; B81B5/00; F15C4/00; F16K31/02; (IPC1-7): G01N35/08; B81B5/00; F15C4/00; F16K31/02
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito