Title:
VALVE
Document Type and Number:
Japanese Patent JP2020159475
Kind Code:
A
Abstract:
To provide a valve capable of acquiring data on internal operation from a portion that is directly connected to the operation, without imposing a burden on a diaphragm.SOLUTION: A valve V has: a valve body 1 comprising a flow passage; a diaphragm 22 that opens and closes the flow passage; a piezoelectric element 3 formed on the surface of the diaphragm 22, and in which a piezoelectric film 31 and a conductive film 32 are sequentially and uniformly laminated; and measuring means of measuring the potential difference between the diaphragm 22 and the piezoelectric element 3.SELECTED DRAWING: Figure 2
Inventors:
TAI SHUNSUKE
KIMURA JUN
KIMURA JUN
Application Number:
JP2019059662A
Publication Date:
October 01, 2020
Filing Date:
March 27, 2019
Export Citation:
Assignee:
FUJIKIN KK
International Classes:
F16K37/00; F16K7/17
Attorney, Agent or Firm:
Toshio Kasukawa
Yoshiyuki Ishibashi
Kimizu Shimizu
Saki hunting
Yoshiyuki Ishibashi
Kimizu Shimizu
Saki hunting