PURPOSE: To form vapor deposited films having high homogeneity, uniform properties and reliability by providing a member for regulating the area where an active as acts in the part where a substrate faces the active gas outlet of a discharge tube and the substrate is blown with the active gas.

CONSTITUTION: A discharge tube 8 for a gas is provided on the bottom wall of a vacuum vessel 1 in such a way that the outlet 25 thereof or an active gas faces the lower outside circumferential surface of a substrate 4. A member 9 for regulating the area where the active gas acts is disposed in such a way as to shield the periphery in the central part of the area where both face each other. Thus the compsn. components introduced to the substrate are made extremely uniform and the vapor deposited films having high homogeneity, uniform properties and high reliability are formed surely.