To provide a vapor deposition apparatus which is capable of uniformly supplying gaseous oxygen in the width direction under a high temperature and improving electromagnetic transduc characteristics of a magnetic recording medium and oxygen or oxygen-containing gas supply apparatus used for this apparatus.

This vapor deposition apparatus is an apparatus to deposit a magnetic material by evaporation in an oxygen or oxygen-containing atmosphere and in the apparatus, a plurality of pieces of gas blowing openings are formed at prescribed intervals in a gas supply section for supplying oxygen or an oxygen-containing gas. This oxygen or oxygen-containing gas supply apparatus is used for this vapor deposition system, is used in depositing a magnetic material in the oxygen or oxygen-containing atmosphere and the plurality of pieces of the gas blowing openings are formed at prescribed intervals.