PURPOSE: To facilitate the operation to house crystal pieces in vapor deposition frames and to hold many piezoelectric pieces with uniform force so as to form vapor deposited films with exact positional accuracy and to obtain good vibration characteristics.

CONSTITUTION: The piezoelectric pieces 12 are disposed respectively in plural holding holes 13 corresponding to the outside shapes of the piezoelectric pieces 12 bored in a middle frame 11 and 1st and 2nd masks 14, 15 respectively having mask holes 16 are installed along both side plate surfaces of this middle frame 11. Cut grooves 17 to permit the displacement in the plate thickness direction are provided on the outer peripheries of the mask holes 16 of the one mask 15. A retaining frame 18 having tongue pieces 19 to elastically press the outer peripheral parts of the mask holes 16 is installed along the middle frame. Power frames 20, 21 which position the middle frame 11, the respective masks 14, 15 and the retaining frame 18 by means of dowels and tighten these frames and masks integrally in the plate thickness direction are provided.