Title:
VAPOR DEPOSITION MASK, AND MANUFACTURING METHOD OF VAPOR DEPOSITION MASK
Document Type and Number:
Japanese Patent JP2019199645
Kind Code:
A
Abstract:
To provide a vapor deposition mask capable of heightening weld strength, while suppressing occurrence of deformation such as warp.SOLUTION: A vapor deposition mask 20 includes an outside part 17 of the vapor deposition mask 20, and an inside part 18 arranged inside the outside part 17. A plurality of open holes 25 are formed through the inside part 18. The outside part 17 is constituted of an iron alloy containing nickel, and contains a sulfur constituent. The sulfur content in the outside part 17 is 0.019 mass% or more and 0.046 mass% or less.SELECTED DRAWING: Figure 6
Inventors:
MIYATANI ISAO
Application Number:
JP2018095663A
Publication Date:
November 21, 2019
Filing Date:
May 17, 2018
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
C23C14/04; C25D1/08; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Yukihiro Hotta
Kazuya Yamashita
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Yukihiro Hotta
Kazuya Yamashita