Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VAPOR DEPOSITION METHOD FOR VAPOR-PHASE ORGANIC MATTER, AND VAPOR DEPOSITION SYSTEM FOR VAPOR-PHASE ORGANIC MATTER UTILIZING THE SAME
Document Type and Number:
Japanese Patent JP3962349
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To make fine adjustment of the mixing amount of organic materials by uniformly depositing a vapor-phase organic matter by evaporation on a substrate having a wide area and depositing an organic thin film at a high speed thereon.
SOLUTION: A vapor deposition system includes a jetting section 110 provided with a base material stabilizing section 140 for stabilizing a base material 10 used for depositing the vapor-phase organic matter by evaporation in its internal space and jets the vapor-phase organic matter in the direction of the stabilizing section, a vapor deposition chamber 100 including one or more heat insulating heaters 130, one or more carrier gas lead-in holes formed to a hole shape so as to lead in the carrier gas for carrying the vapor-phase organic matter, and one or more lead-out holes formed to a hole shape so as to lead out the organic matter vapor and the carrier gas. The system includes a crucible 220 capable of storing the organic matter, one or more organic matter chambers 200 internally including organic matter heaters for heating the inside of the crucible, a flow rate control section 400 for controlling the amount of the carrier gas to be led into the organic matter chambers and the velocity of flow thereof, a transfer pipe 210 for the vapor-phase organic matter in which the organic matter in the organic matter chambers can move to the jetting section and a vacuum pump 150.


More Like This:
WO/1999/004061LIQUID DELIVERY SYSTEM COMPRISING UPSTREAM PRESSURE CONTROL MEANS
JP5960754Liquid organometallic compound supply system
JP2567988[Name of invention] Liquid material gasification supply device
Inventors:
Kim, don-su
Bae Kyung-bin
Choi, Dong-gon
Application Number:
JP2003097183A
Publication Date:
August 22, 2007
Filing Date:
March 31, 2003
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ANS Inc.
International Classes:
C23C16/448; C23C14/12; C23C16/455; C23C16/44; (IPC1-7): C23C16/448; C23C16/455
Domestic Patent References:
JP11293461A
Foreign References:
US20030192471
Attorney, Agent or Firm:
Aniya Setsuo
Toru Yui
Hitoshi Kiyono



 
Previous Patent: SWASH PLATE SERVO DEVICE FOR SWASH PLATE PLUNGER TYPE HYDRAULIC UNIT

Next Patent: INTERNAL GEAR FORMING METHOD