Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VAPOR GROWTH DEVICE FOR PHOTO-CVD
Document Type and Number:
Japanese Patent JPH033229
Kind Code:
A
Abstract:

PURPOSE: To equalize the thickness of a film and also improve work efficiency by providing a lamp, which emits light, at the center of a cylindrical susceptor where wafers are mounted at the periphery of the inner face.

CONSTITUTION: This is equipped with a cylindrical susceptor 12 where wafers 16 are mounted at the periphery of the inner face, a lamp 14 which emits light to the periphery, being arranged at the center of the cylindrical susceptor, and a heater 15 which heats the wafers, being arranged outside the cylindrical susceptor. By this constitution, a number of wafers can be processed by the work of one time, and also the light emitted from the whole periphery of the lamp can irradiate all the wafers effectively, and the thickness of a film being grown never becomes nonuniform.


Inventors:
HOSHINO MASATAKA
Application Number:
JP13577389A
Publication Date:
January 09, 1991
Filing Date:
May 31, 1989
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJITSU LTD
International Classes:
H01L21/205; H01L21/263; (IPC1-7): H01L21/205; H01L21/263
Attorney, Agent or Firm:
Shoji Kashiwaya (1 person outside)