To efficiently vaporize raw material at a desired concn. and flow rate without overheating the raw material by forming a vaporization vessel to a spherical shape or a shape using many other curved surfaces, forming the swirling flow of a carrier gas within the vaporization vessel and heating the outside of the vaporization vessel.
The vaporization vessel 1 is formed to the spherical shape or barrel shape or a cylindrical shape or elliptic shape rounded at its ends or the combined shape using the other many curved surfaces. A raw material supply port 2 is disposed in the central part in, for example, the uppermost part thereof and a vaporizing gas outlet 3 in the central part in, for example, the lowermost part thereof, respectively. A carrier gas introducing port 4 is disposed in such a manner that the carrier gas flows along the wall surfaces of the vaporization vessel and forms the swirling flow 7 in the vaporization vessel 1 and that the atomized raw material flows along the center of the vaporization vessel 1. Means for heating the outside of the vaporization vessel 1, for example, block heater, are disposed on the outside of the vessel 1. As a result, the raw material is efficiently vaporized at the desired concn. and flow rate without overheating the raw material.
YONEYAMA GAKUO
ISHIHAMA YOSHIYASU
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