To provide a variable capacitance capacitor having capacitance that largely changes due to application of DC bias voltage in an embodiment of the present invention, and having a capacitance value that changes in a small amount over time when the application of the DC bias voltage is continued.
A variable capacitance capacitor element 50 according to an embodiment of the present invention includes a support substrate 51, a first electrode layer 59 provided on the support substrate 51, a second electrode layer 60 provided to face the first electrode layer, and a dielectric layer 61 arranged between the first electrode layer 59 and the second electrode layer 60. In one aspect, the dielectric layer 61 has a main component represented by the composition formula Ba1-xSrxTiO3 (0.5≤x≤0.8), and a thickness equal to or less than 200 nm.
WO/2015/030170 | VARIABLE CAPACITANCE ELEMENT |
WO/2000/024079 | VOLTAGE TUNABLE VARACTORS AND TUNABLE DEVICES INCLUDING SUCH VARACTORS |
JP2023110020 | HIGH-VOLTAGE TUNABLE MULTILAYER CAPACITOR |
IKENAGA MICHIKAZU
NAKAMURA KENTARO
JP2006049840A | 2006-02-16 | |||
JPH10256085A | 1998-09-25 | |||
JP2011119482A | 2011-06-16 | |||
JP2010055570A | 2010-03-11 | |||
JP2007227798A | 2007-09-06 |
WO2008149622A1 | 2008-12-11 |
Hidehiko Ichikawa