Title:
VARIABLE CAPACITANCE DEVICE AND DRIVE METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2013232536
Kind Code:
A
Abstract:
To achieve high power resistance.
The variable capacitance device includes a first MEMS variable capacitance element 10a and a second MEMS variable capacitance element 10b having one end connected in series to one end of the first MEMS variable capacitance element. At a down state, a first capacitance value of the first MEMS variable capacitance element is different from a second capacitance value of a second MEMS variable capacitance element.
Inventors:
IKEHASHI TAMIO
YAMAZAKI HIROAKI
YAMAZAKI HIROAKI
Application Number:
JP2012103926A
Publication Date:
November 14, 2013
Filing Date:
April 27, 2012
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01G5/16
Attorney, Agent or Firm:
Kurata Masatoshi
Takakura Shigeo
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Takao Ako
Tadashi Inoue
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takakura Shigeo
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Takao Ako
Tadashi Inoue
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori