Title:
可変容量装置
Document Type and Number:
Japanese Patent JP5418604
Kind Code:
B2
Abstract:
A variable capacitance device includes a substrate, a beam portion, lower drive electrodes and upper drive electrodes. The beam portion is made of an insulating material and is connected to the substrate via an anchor portion. In the lower drive electrode and the upper drive electrode, electrostatic attraction generated by the application of a DC voltage continuously changes. In the lower drive electrodes and the upper drive electrode, electrostatic capacitance generated by the application of an RF signal between the electrodes on both sides continuously changes in accordance with the deformation of the beam portion due to the electrostatic attraction. The beam portion includes an inner circumferential portion including the upper drive electrode, an outer circumferential portion including the upper drive electrode, and ladder portions sandwiched by the inner circumferential portion and the outer circumferential portion. The beam portion has a cross-sectional area that is reduced by the ladder portions.
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Inventors:
Keiichi Umeda
Application Number:
JP2011549867A
Publication Date:
February 19, 2014
Filing Date:
November 22, 2010
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H01G5/16; B81B3/00
Domestic Patent References:
| JP2006087231A | 2006-03-30 | |||
| JP2009055683A | 2009-03-12 | |||
| JPH10149951A | 1998-06-02 |
Attorney, Agent or Firm:
Kaede International Patent Office