Title:
VARIABLE-CAPACITANCE ELEMENT FOR HIGH FREQUENCY AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3599558
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide the manufacturing method of a variable-capacitance element for high frequency at a low cost that can be readily formed on a ceramic substance, of which capacitance changes greatly at low voltage, and of which the capacitor characteristics do not deteriorate even at a frequency of 1 GHz or higher.
SOLUTION: In this method, a film comprising a low-resistance, non-oxide metal is formed as a lower electrode 2 through the application pyrolysis method. A dielectric thin film 3 is formed on the lower electrode 2 through the application and pyrolysis method. A single layer film or a laminated film comprising a low-resistance non-oxide metal, a high-melting point metal, a low-resistance non-oxide metal is formed on the dielectric thin film 3 as the upper electrode 5 by the sputtering method or vacuum deposition method is formed.
Inventors:
Yoshiyuki Masuda
Ryusuke Kita
Sakiko Sato
Noboru Otani
Ryusuke Kita
Sakiko Sato
Noboru Otani
Application Number:
JP5828298A
Publication Date:
December 08, 2004
Filing Date:
March 10, 1998
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01G7/06; (IPC1-7): H01G7/06
Domestic Patent References:
| JP9148538A | ||||
| JP9069589A | ||||
| JP8273978A |
Attorney, Agent or Firm:
Shintaro Nogawa
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